1997 TMS Annual Meeting: Tuesday Abstracts

LOW ENERGY PROCESSES IN ELECTRONIC MATERIALS: Session I: Energetic Beam Deposition and Synthesis

Session Chairperson: Rajiv K. Singh, University of Florida, 317 MAE, PO Box 116400, Gainesville, FL 32611-6400

8:30 am INVITED

ATOMIC VERSUS MOLECULAR BEAMS FOR DOPING OF III-V MATERIALS DURING GROWTH IN ULTRAHIGH VACUUM: C.R. Abernathy, University of Florida, PO Box 116400, Gainesville, FL 32611

9:00 am INVITED

RECENT ADVANCES IN CARBON NITRIDE AND RELATED HARD COATING MATERIALS: Y.P. Chung, North Western University, 2145 Sheridan Rd., Evanston, IL 60208

9:30 am INVITED

MEASUREMENTS AND SIMULATION OF BEAM-ENHANCED EPITAXIAL GROWTH PROCESSES: E.H. Chason, Sandia National Laboratory, Albuquerque, NM 87185

10:00 am BREAK

Session Chairperson: Roy Clarke, Department of Applied Physics, University of Michigan, Ann Arbor, MI 48109-1120

10:15 am INVITED

MICROSTRUCTURAL EVOLUTION IN LOW ENERGY BEAM PROCESSING OF THIN FILMS: Krishna Rajan, Rensselaer Polytechnique Institute, Dept. of Materials Science & Eng., MRC-110, Troy, NY 12180-3590

10:45 am INVITED

UHV SPUTTER-DEPOSITION OF ULTRATHIN MAGNETIC FILMS AND MULTILAYERS: J.R. Childress, University of Florida, PO Box 116400, Gainesville, FL 32611

11:15 am

DEPOSITION OF DIAMOND FROM ALCOHOL PRECURSORS IN AN ELECTRON CYCLOTRON RESONANCE PLASMA: Donald R. Gilbert, Rajiv K. Singh, University of Florida, PO Box 116400, Gainesville, FL 32611

11:30 am INVITED

SPUTTER DEPOSITION OF PHOSPHORS FOR ELECTROLUMINESCENT FLAT PANEL DISPLAY: Mark R. Davidson, Paul H. Holloway, Balu Pathangey, University of Florida, University of Florida, PO Box 116400, Gainesville, FL 32611